Total internal reflection (TIP) holographic lithography is applied to the fabrication of binary diffractive optical elements with submicrometer surface relief features. The recording conditions for the intermediate TIR volume hologram, used for high-resolution proximity printing, are discussed. In particular, the fabrication of efficient high-carrier-frequency fan-out gratings is considered and experimental results are presented for an off-axis 9x1 fan-out element in photoresist with a carrier frequency of 1000 lines/mm.
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